PLASMA DEVICE USING GRAPHENE AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A plasma device using graphene and a manufacturing method thereof are provided to improve plasma properties by comprising materials including graphene at a protection film. CONSTITUTION: A cavity forming part(170) comprises at least one cavity(C). The cavity accommodates discharge gas. First and second electrode parts(120,180) apply voltage to the cavity. The first and second electrode parts are prepared at the upper and lower parts of the cavity forming part, respectively. A protection film(PL) is formed at a part of the inner wall of the cavity. The protective film is made of materials including graphene.