| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce manufacturing costs of a substrate posture changing device. <P>SOLUTION: A substrate posture changing device 5 includes: a holding unit 6 that can rotate around a rotation axis L1 while holding a substrate W, and in which a position of a center of gravity GC while holding the substrate W is displaced from the rotation axis L1; a rotation stop unit 17 that can stop rotation of the holding unit 6 at plural positions at which rotation angles around the rotation axis L1 are different, and that can hold the holding unit 6 at the plural positions; and a traveling unit 9 that moves the holding unit 6 in a crossing direction D1 crossing with the rotation axis L1 and accelerates or decelerates the holding unit 6 in the crossing direction D1. <P>COPYRIGHT: (C)2013,JPO&INPIT |
