| 摘要 |
PURPOSE: An application apparatus is provided to change the length of a tube and a hard tube and to easily control pressure fluctuation. CONSTITUTION: An application apparatus comprises: a substrate maintaining unit, a nozzle(23), a main injection direction change device, a sub injection direction change device, a flexible coating solution supply pipe(64), a pressure absorbing unit(71), a flux resistance part(72), and a pressure fluctuation absorbing device(70). The pressure absorbing unit changes the volume of a receiving part of a coating solution. |
