POLYMER LAYER SYSTEM PRESSURE SENSOR DEVICE, AND POLYMER LAYER SYSTEM PRESSURE SENSOR METHOD

摘要

The invention relates to a polymer layer system pressure sensor device and to a polymer layer system pressure sensor method. The polymer layer system pressure sensor device comprises: a first polymer substrate (5; 5a) which comprises a first cavity (8; 8a, 8b); a first polymer membrane (4) which is stretched over the first cavity (8; 8a, 8b) and which can be deflected dependent on a pressure (PM) in the first cavity (8; 8a, 8b); a first membrane metallization layer (6; 6a) which is applied to the first polymer membrane (4) above the first cavity (8; 8a) and which can be deflected together with the first polymer membrane (4) dependent on the pressure (PM) in the first cavity (8; 8a, 8b); a second polymer substrate (3) which is arranged over the first polymer membrane (4) and which comprises a second cavity (9) that is arranged over the first cavity (8; 8a, 8b); a second polymer membrane (2) which is stretched over the second cavity (9); a second membrane metallization layer (7; 7a) that is applied to the second polymer membrane (2) within the second cavity (9); and a third polymer substrate (1) which is arranged over the second polymer membrane (2).