| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alkali solubility improving agent for a resist, capable of improving solubility of a resist with an alkali during alkali development by adding the agent into an alkali-soluble resin for a resist. <P>SOLUTION: The alkali solubility improving agent for a resist comprises a rosin derivative (A), which contains 30 to 80 wt.% of a maleopimaric acid anhydride (a-1) and a dihydromaleopimaric acid anhydride (a-2), at least 5 wt.% of the dihydromaleopimaric acid anhydride (a-2), and 5 wt.% or less of maleopimaric acid and fumaropimaric acid (a-3) and which has an acid value of 240 or more and a softening point of 100°C or higher. <P>COPYRIGHT: (C)2013,JPO&INPIT |
