| 摘要 |
PURPOSE: A measuring device and a calibrating method thereof are provided to correct a focal distance of a photographing unit and to compensate the distortion caused by the non-uniformity of an optical system arranged inside the measuring device, thereby enhancing the reliability of the measurement. CONSTITUTION: A measuring device(100) comprises a stage(160), a projection unit(120), a lighting unit(130), a photographing unit(140), and a beam splitter(150). The stage supports and transfers a substrate(110) where a measurement object(112) is formed. The lighting unit irradiates lights on the substrate. The photographing unit photographs the images of the substrate. The beam splitter is arranged in the lower part of the photographing unit, thereby reflecting some of the incident lights and transmitting the rest.
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