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发明名称
摘要
申请公布号	JP5156331(B2)	申请公布日期	2013.03.06
申请号	JP20070279968	申请日期	2007.10.29
申请人		发明人
分类号	H01L21/822;H01L21/331;H01L27/04;H01L27/06;H01L29/732	主分类号	H01L21/822
代理机构		代理人
主权项
地址

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