发明名称 HEAT RADIATION UNIT AND EXPOSURE APPARATUS
摘要 PURPOSE: A heat radiating unit and an exposure apparatus are provided to prevent one or more parts of a heat radiating plate from dropping by supporting the light receiving surface of the heat radiating plate using a plate. CONSTITUTION: A heat sink radiates heat which is generated by light from light source. A heat radiating plate(34A) is adjacently arranged to the light source and is composed of ceramics. A heat radiating unit(30A) includes a supporting unit to support the heat radiating pate on the heat sink. A plate supports the light receiving surface of the heat radiating plate and receives the light and transmits the light.
申请公布号 KR101240018(B1) 申请公布日期 2013.03.06
申请号 KR20100014924 申请日期 2010.02.19
申请人 发明人
分类号 G03F7/20;H01L21/027;H05K7/20 主分类号 G03F7/20
代理机构 代理人
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