METHOD FOR FORMING METAL LINE

摘要

PURPOSE: A method for manufacturing a metal line is provided to minimize attack against a metal oxide layer. CONSTITUTION: A metal oxide film is formed on a substrate. A copper metal layer is formed on the metal oxide layer. A photoresist material is selectively left on the copper metal layer. An upper copper metal layer is etched by using etching solution which includes hydrogen peroxide, azole compound, sulfonic acid, and water.