发明名称 |
DEVICE OF BREAKING BRITTLE MATERIAL SUBSTRATE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device of breaking a brittle material substrate capable of breaking the substrate vertically from a scribe line. <P>SOLUTION: Receiving blades 54A and 54B are rotatably fixed above a pair of support members 53A and 53B mounted to be movable with a minute interval. The receiving blades are closed, and the substrate 40 is arranged so that the position is adjusted to the scribe line 43. The substrate 40 is pressed by a blade 23 from above. Thus, the receiving blades move mutually to the opposite directions, and the substrate 40 can be broken in a cross section perpendicular to the scribe line. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013043414(A) |
申请公布日期 |
2013.03.04 |
申请号 |
JP20110184297 |
申请日期 |
2011.08.26 |
申请人 |
MITSUBOSHI DIAMOND INDUSTRIAL CO LTD |
发明人 |
SUGATA MITSURU;MURAKAMI KENJI;TAKEDA MASAKAZU |
分类号 |
B28D5/00;C03B33/023;H01L21/301 |
主分类号 |
B28D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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