| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diffraction grating that shows different diffraction characteristics to reflected light and transmitted light. <P>SOLUTION: A diffraction grating comprises: a transparent substrate 4 on which a surface asperity structure 5 is formed at intervals; and a metal film 11 that is provided on a surface of the transparent substrate and forms a surface shape pattern at intervals differently from the surface asperity structure. In the case of reflected light by the metal film, diffraction light corresponding to the surface asperity structure and the surface shape pattern is generated, and in the case of light transmitted through the transparent substrate, diffraction light corresponding to the surface shape pattern of the metal film is generated. For instance, an organic material layer 6, which is made of an organic material with hardness changing by energy beam irradiation such as light or electronic beam, is formed between the transparent substrate and the metal film. The organic material layer has a periodic hardness change pattern formed by the energy beam irradiation so as to be different from the surface asperity structure of the transparent substrate. The surface shape pattern of the metal film is formed in accordance with a hardness change pattern 7 of the organic material layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
