| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure the composition dependency of dielectric breakdown voltage characteristics of a contact material composed of a multi-component alloy in a short period of time. <P>SOLUTION: A thin film 6 in which components are changed in succession, is formed by heating and vaporizing a plurality of metal-based substances selected from Cu, Cr, Ag and the like used as contact materials, and depositing the resulting vapor on a substrate 5. Then, the thin film 6 is grounded as a flat plate electrode, and a needle electrode 11 is arranged opposite to the thin film 6 with a predetermined gap from the thin film 6. Thereafter, the dielectric breakdown voltage between the needle electrode 11 and the thin film 6 is measured while moving the thin film 6 in the direction orthogonal to the axis direction of the needle electrode 11 at a prescribed interval. The estimation method searches for the relationship between varied component amounts and dielectric breakdown voltage. <P>COPYRIGHT: (C)2013,JPO&INPIT |
