发明名称 Copper plating - by chemical reduction of aq alkaline solns
摘要 <p>The soln. comprises a source of Cu ions, a complexing agent (Rochelle salt), reducing agent (formaldhyde), and a stabiliser in the form of small atms. of o-phenanthroline and Na/K iodides (pref. at 0.0001-0.01 gpl), used at pH 10-14, and 15-32 degrees C to effect plating on catalytic metal surfaces or activated synthetic substrates. Used for depositing conducting copper paths in intergrated circuit mfr, the soln. is stable over extended periods.</p>
申请公布号 FR2076199(A5) 申请公布日期 1971.10.15
申请号 FR19700000218 申请日期 1970.01.06
申请人 IMASA 发明人
分类号 C23C18/40;(IPC1-7):23C3/00 主分类号 C23C18/40
代理机构 代理人
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