发明名称 TRANSFER MECHANISM
摘要 <P>PROBLEM TO BE SOLVED: To provide a transfer mechanism capable of transferring a workpiece while holding by the deadweight thereof. <P>SOLUTION: Transfer mechanisms 24, 64 for transferring a workpiece comprises: arms 26, 28, 66, 68 capable of bending and turning; picks 30, 32, 70, 72 provided at the tip of the arm and holding the workpiece; and a plurality of holding materials 34 provided in the picks and holding the peripheral edge of the workpiece by abutting against the peripheral edge and oscillating by the deadweight of the workpiece. Consequently, the workpiece can be transferred while being held by the deadweight thereof. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013045912(A) 申请公布日期 2013.03.04
申请号 JP20110183236 申请日期 2011.08.25
申请人 TOKYO ELECTRON LTD 发明人 ABE JUNICHI
分类号 H01L21/677;B65G49/07 主分类号 H01L21/677
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