PROCESSES FOR SUPPRESSING MINORITY CARRIER LIFETIME DEGRADATION IN SILICON WAFERS
摘要
<p>Processes for suppressing minority carrier lifetime degradation in silicon wafers are disclosed. The processes involve quench cooling the wafers to increase the density of nano-precipitates in the silicon wafers and the rate at which interstitial atoms are consumed by the nano-precipitates.</p>
申请公布号
WO2012167104(A4)
申请公布日期
2013.02.28
申请号
WO2012US40492
申请日期
2012.06.01
申请人
MEMC SINGAPORE PTE, LTD.;FALSTER, ROBERT J.;VORONKOV, VLADIMIR V.
