| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mounting table structure which can enhance uniformity of in-plane temperature of an article to be processed, and can enhance heating efficiency for the article to be processed by embedding a soaking member integrally in a mounting table. <P>SOLUTION: A mounting table structure, where heat means 38 for heating an article W to be processed is embedded in order to perform specified heat treatment on the article W to be processed in a processing container 4, comprises: a mounting table 32 for mounting the article to be processed; and a column 30 for supporting the mounting table while standing from a bottom of the processing container. The mounting table structure is constituted so that a soaking member 40 spreading in a plane direction is embedded in the mounting table disposed above the embedded heating means. <P>COPYRIGHT: (C)2013,JPO&INPIT |
