| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a moving device that can move an object mounted on a mounting surface to a first direction along the mounting surface. <P>SOLUTION: The moving device 11 includes: contact means 51 and 53 to contact the object mounted on a mounting surface so that the contact force to the object may have a component in a second direction; a mounting means that has a mounting surface and is relatively reciprocatable in a first direction with respect to the contact means 51 and 53; mounting means driving means 21f1, 21f2, 21b1 and 21b2 that move outward and move inward the mounting means relatively to the first direction; and contact means driving means 61a, 61b, 63a and 63b that drive the contact means 51 and 53, wherein the displacement difference that is a difference between the mounting surface displacement amount that is the displacement amount in the first direction of the mounting surface and the object displacement amount that is the displacement amount in the first direction of the object is made different in the outward movement and the inward movement of the mounting means by the contact means driving means 61a, 61b, 63a and 63b increasing the component of the contact force in the second direction in the other side rather than the one side of the outward movement and the inward movement. <P>COPYRIGHT: (C)2013,JPO&INPIT |
