| 摘要 |
<p>This invention allows for observation or capture of high-contrast images for test samples from which no sufficient contrasts can be obtained by bright-field observation, such as wafers having small pattern differences in level. According to the invention, a test sample is illuminated through an objective lens used for image captures, and an aperture filter is disposed in an image-capture optical system, thereby significantly attenuating the light of bright-field observation components and capturing images.</p> |
