| 摘要 |
<P>PROBLEM TO BE SOLVED: To avoid a short circuit of inter-transistor connection wiring with a suspension word line. <P>SOLUTION: A semiconductor device (100) comprises: a plurality of active regions (50) arranged in a first direction (X) next to each other each including two vertical transistors (51) arranged at a distance from each other in a second direction (Y) orthogonal to the first direction (X) and a pillar (1a) located between the two vertical transistors (51); a suspension word line (23) arranged at a central position of each of the plurality of active regions (50) and extending in the first direction (X); and inter-transistor connection wiring (21, 10A, 16) extending in the second direction (Y) for connecting the two vertical transistors (51) so as to bypass the suspension word line (23). <P>COPYRIGHT: (C)2013,JPO&INPIT |
