Producing layers in coating plant, comprises providing substrate, forming layer, and short-time annealing of layer, where energy input of the short-time annealing of deposited layer is adjusted to obtain predetermined final temperature

摘要

Producing layers in coating plant (2), comprises (a) providing a substrate (10), (b) forming at least one layer on the substrate by depositing, and (c) short-time annealing of the layer deposited on the substrate, while avoiding an immediate heating of the entire substrate, where the energy input of the short-time annealing of the deposited layer is adjusted to obtain a predetermined final temperature of the deposited layer. An independent claim is also included for a device for performing the above method, comprising at least one coating module (31), which is associated with a device for short-time annealing of the layer deposited on the substrate, and a further means (41) for controlling the energy input of the device for short-time annealing.