| 摘要 |
PURPOSE: A recycling device of waste sulfuric acid polluted by hydrogen peroxide is provided to the recycle sulfuric acid by decomposing the hydrogen peroxide and the sulfuric acid using a hydrogen peroxide decomposing agent with polluted waste sulfuric acid to hydrogen peroxide during a production process of semiconductor. CONSTITUTION: A recycling device of polluted waste sulfuric acid by hydrogen peroxide comprises a hydrogen peroxide decomposing tower(100), a gas absorbing tower(200), a sub tank(300), and a sulfuric acid reservoir(400). The hydrogen peroxide decomposing tower comprises a upper part of decomposing bath(120), a lower part of decomposing bath(150), and a discharge pipe(190). The gas absorbing tower, the filter(230) which dispersing gas particle to enlarge contacting surface with water, is filled on the top of the second porous mesh board(240). The gas absorbing tower includes the multiple layers of gas absorbing baths(260, 270) which are installed with a sprinkling rod(250) which jets water on the top of the filter. The lower gas absorbing bath and the lower water tub(280) filled with water are connected by the gas discharging pipe(220) of hydrogen peroxide decomposing tower. To supply water to the sprinkling rod on a side of lower water tub(280), a water pipe(215) with the second pump(210) is installed. On the upper gas absorbing tub(260), the ventilation pipe(290) is formed. The sub tank circulates the waste sulfuric acid. The sulfuric acid reservoir stores sulfuric acid produced by the hydrogen peroxide decomposing tower. |
