APPARATUS AND METHOD FOR BALANCING COMBINED RF POWER- SUPPLIES FOR DRIVING A CO2 GAS-DISCHARGE LASER

摘要

Radio-frequency (RF) power supply apparatus for supplying RF power to discharge electrodes of a gas-discharge laser includes a plurality of amplifier modules each having an RF output. A power combining arrangement is provided for combining the amplifier module RF-outputs into a single combined RF-output connected to the discharge electrodes. A DC power supply is connectable to or disconnectable from each of the transistor amplifier modules, separately, to allow current drawn by any of the amplifier modules to be monitored by a single current sensor.