发明名称 CAPACITOR AND METHOD OF FORMING SAME
摘要 A device comprises a substrate having at least one active region, an insulating layer above the substrate, and an electrode in a gate electrode layer above the insulating layer, forming a metal-oxide-semiconductor (MOS) capacitor. A first contact layer is provided on the electrode, having an elongated first pattern extending in a first direction parallel to the electrode. A contact structure contacts the substrate. The contact structure has an elongated second pattern extending parallel to the first pattern. A dielectric material is provided between the first and second patterns, so that the first and second patterns and dielectric material form a side-wall capacitor connected in parallel to the MOS capacitor.
申请公布号 US2013049088(A1) 申请公布日期 2013.02.28
申请号 US201113221419 申请日期 2011.08.30
申请人 AN CHI-DI;CHEN CHIEN-HUNG;CHAN YU-JUAN;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 AN CHI-DI;CHEN CHIEN-HUNG;CHAN YU-JUAN
分类号 H01L27/06;H01L21/02 主分类号 H01L27/06
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