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发明名称
Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür
摘要
申请公布号
CH518624(A)
申请公布日期
1972.01.31
申请号
CH19700018510
申请日期
1970.12.14
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
ROESS,DIETER,DR.;KIEMLE,HORST,DR.
分类号
B23K26/064;G03H1/00;H01L21/00;H01L21/027;H01L23/544;(IPC1-7):H01L19/00;G02F1/38
主分类号
B23K26/064
代理机构
代理人
主权项
地址
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