Passivation of integrated circuits containing ferroelectric capacitors and hydrogen barriers

摘要

An integrated circuit that includes a logic region, a buffer region, and a ferroelectric capacitor region that contains ferroelectric capacitors. The integrated circuit also includes a hydrogen diffusion barrier film that overlies ferroelectric capacitors and also overlies a buffer region located between a ferroelectric capacitor region and a logic region. However, the hydrogen diffusion barrier film is removed from a portion of the logic region. Moreover, a method for forming a hydrogen barrier layer that overlies ferroelectric capacitors and a buffer region but is removed from a portion of the logic region.