MANUFACTURING APPARATUS OF DISPLAY DEVIEC

摘要

PURPOSE: An apparatus for manufacturing a display device is provided to reduce a bottom area of a clean room by vertically arranging a plurality of processing chambers and transferring the substrate from a plane direction to the vertical direction. CONSTITUTION: A substrate lifting unit(100) vertically lifts a substrate. A plurality of processing chambers(200) surround the substrate lifting unit. The plurality of processing chambers are spirally arranged in a vertical direction. The substrate lifting unit includes a plurality of lifting inlets. The plurality of substrate lifting inlets input the substrate to the processing chamber.