| 摘要 |
<p>Precision positioning device related to devices specifically for high-resolution positioning and measuring systems including optical elements positioning devices. Consisting of housing, it contains rectilinear motion piezodrive and movable optical element holder with an optical element. Additionally introduce two piezoactuator, rigidly fixed in the housing, and optical element holder is disc-shaped raster scale, which is mounted in a horizontal plane of the housing between the piezoactuator and piezodrive.</p> |
