发明名称 |
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor device having a lateral bipolar transistor which enables obtaining excellent contact with an emitter polysilicon, and a manufacturing method of the semiconductor device. <P>SOLUTION: A semiconductor device having a lateral bipolar transistor including: a substrate composing a first conductive layer; an n-hill layer 312 arranged on the first conductive layer; an open region opened on an element isolation oxide film 320 surrounding the n-hill layer 312; a polysilicon film 910 formed on the open region; an emitter region solid-phase diffused from the polysilicon film 910; and a dummy gate polysilicon 706 formed in the element isolation oxide film 320. The dummy gate polysilicon 706 controls a shape of the emitter region solid-phase diffused from the polysilicon film 910. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013038445(A) |
申请公布日期 |
2013.02.21 |
申请号 |
JP20120223633 |
申请日期 |
2012.10.05 |
申请人 |
ASAHI KASEI ELECTRONICS CO LTD |
发明人 |
MARCO KORICIC;TOMISLAV SULIGOJ;MOCHIZUKI HIDENORI;MORITA SHUICHI |
分类号 |
H01L21/331;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/73 |
主分类号 |
H01L21/331 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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