| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged-particle microscopy imaging method that lends itself to application with samples comprising unknown composition/geometry, and that allows automatic deconvolution of measured data and automatic generation of sub-surface imagery. <P>SOLUTION: The method comprises irradiating a surface of the sample using a probing beam of charged particles in a number (N) of measurement sessions, each measurement session having an associated beam parameter (P) value that is chosen from a range of such values and that differs between measurement sessions. The method further comprises detecting stimulated radiation emitted by the sample during each measurement session, associating a measurand (M) with each measurement session, and noting the value of this measurand (M) for each measurement session, thus allowing compilation of a data set (S) of data pairs äP<SB POS="POST">n</SB>, M<SB POS="POST">n</SB>} satisfying 1≤n≤N, where a mathematical technique is employed to automatically process the data set (S). <P>COPYRIGHT: (C)2013,JPO&INPIT |
