SILICON CARBIDE HEATING ELEMENT FOR RAW MATERIAL GAS SUPPLY

摘要

PROBLEM TO BE SOLVED: To provide a silicon carbide heating element for raw material gas supply with good air permeability.

SOLUTION: The silicon carbide heating element 1 for raw material gas supply comprises a gas-permeable heating member 2 that is made of silicon carbide and generates heat when current is applied thereto and end members 3 that apply current to the gas-permeable heating member 2, and has a pipe shape of a structure that is closed at one end. The gas-permeable heating member has porosity of 20 to <35% and gas permeability of ≥0.04 slpm cm/torr cm2.

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