| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an observation device capable of accurately detect minute foreign materials adhered to a surface of a transparent object and minute defects on the surface of the transparent object. <P>SOLUTION: The observation device for surface includes a light source device, a polarization conversion device, a half-mirror, a lens, a light receiving module, a circuit board, a housing, a processor, etc. The light receiving module includes a polarization filter 151, a micro lens array 153, an image sensor, etc. A gap Dint between a +Z side surface of the polarization filter 151 and the micro lens array 153 are set to be a lens pitch Pml or smaller in the micro lens array 153. <P>COPYRIGHT: (C)2013,JPO&INPIT |
