| 摘要 |
FIELD: electrical engineering.SUBSTANCE: proposed is a sensor (800) wherein the membrane (830) is formed over the front substrate (615); with a piezoelectric layer (820) over the membrane (830) within the active section (821), while the peripheral sections are positioned close to the active section (821). A structured electrically conductive layer including the first and the second electrodes (840, 845) is formed over the piezoelectric layer (820). Additionally envisaged is the structure of the rear substrate having holders (822, 824) positioned within the peripheral sections adjacent to the active one (821). The height (826) of the holders (822, 824) is in excess of the combined height (828) of the structured piezoelectric layer and the structured electrically conductive layer. Multiple sensors may be connected to form an array where a controller may be envisaged for control of the array, e.g., for control of the array beam as well as for processing signals received by the array to detect present and/or motion and/or e.g. to generate and image.EFFECT: ensuring the possibility to create tiny sensors that are thinner, less bulky and flexible as well as simpler to manufacture, at the same time having high electroacoustic operational characteristics.37 cl, 32 dwg |
