APPARATUS FOR TREATING SURFACE OF MINUTE PARTICLES

摘要

PURPOSE: An apparatus for treating the surface of fine particles is provided to improve the efficiency of a surface process by controlling the time for coinciding with plasma and the fine particles. CONSTITUTION: Fine particles are flowed in a surface process pipe(110) which is inclined. A slope adjustment part(120) controls the slope of the surface process pipe. A fine particle supplying part(130) supplies the fine particles to the surface process tube. A control unit(140) transmits the information of the fine particles to the slope adjustment part.