发明名称 |
ARC DISCHARGE EVAPORATION COATING SOURCE |
摘要 |
A coating source for physical vapor deposition has at least one component, which has been produced from at least one pulverulent starting material in a powder metallurgy production process and at least one ferromagnetic region embedded in the component. The at least one ferromagnetic region, is introduced into the component and fixedly connected to the component during the powder metallurgy production process. |
申请公布号 |
EP2558608(A1) |
申请公布日期 |
2013.02.20 |
申请号 |
EP20110722273 |
申请日期 |
2011.04.12 |
申请人 |
PLANSEE SE |
发明人 |
POLCIK, PETER;POLZER, CONRAD;PERL, MATTHIAS;SCHLICHTHERLE, STEFAN;STRAUSS, GEORG |
分类号 |
C23C14/32;B22F7/06;C23C14/34;H01J37/34 |
主分类号 |
C23C14/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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