发明名称 Memory arrays where a distance between adjacent memory cells at one end of a substantially vertical portion is greater than a distance between adjacent memory cells at an opposing end of the substantially vertical portion and formation thereof
摘要 Memory arrays and their formation are disclosed. One such memory array has a string of series-coupled memory cells with a substantially vertical portion. A distance between adjacent memory cells at one end of the substantially vertical portion is greater than a distance between adjacent memory cells at an opposing end of the substantially vertical portion. For other embodiments, thicknesses of respective control gates of the memory cells and/or thicknesses of the dielectrics between successively adjacent control gates may increase as the distances of the respective control gates/dielectrics from the opposing end of the substantially vertical portion increase.
申请公布号 US8378412(B2) 申请公布日期 2013.02.19
申请号 US20100903264 申请日期 2010.10.13
申请人 MICRON TECHNOLOGY, INC.;GODA AKIRA 发明人 GODA AKIRA
分类号 H01L29/66 主分类号 H01L29/66
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