| 摘要 |
PURPOSE: A transport system for horizontally returning a flat object and an inline dipping implementation method using the same are provided to arrange a barrier structure into a shape in which an upper sheet and a lower sheet are pressed by each other using elastic force of a Polytetrafluoroethylene(PTFE) sheet, thereby preventing chemical leakage. CONSTITUTION: An in-bath structure comprises a chemical bath(140) in which chemicals are stored by establishing a partition wall. A horizontal return section is comprised of an upper roller(110) and a lower roller(120). The horizontal return section comprises a front shaft(170) for receiving a wafer(400) and a rear shaft(180) for transferring the wafer. A roll brush(160) and an ultrasonic processing apparatus(150) for a washing process are installed on the chemical bath. A barrier structure(510,520) is installed on one side in which the wafer is transferred. |
