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发明名称
摘要
申请公布号
JPH036664(B2)
申请公布日期
1991.01.30
申请号
JP19850195311
申请日期
1985.09.04
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
IWAHASHI HIROSHI
分类号
H01L27/04;G11C11/401;H01L21/822
主分类号
H01L27/04
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