| 发明名称 |
Drive loop for MEMS oscillator |
| 摘要 |
Some embodiments regard a method comprising: generating a current according to a movement of the MEMS device; the movement is controlled by a control signal; generating a peak voltage according to the current; and adjusting the control signal when the peak voltage is out of a predetermined range.
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| 申请公布号 |
US8378756(B2) |
申请公布日期 |
2013.02.19 |
| 申请号 |
US20100782064 |
申请日期 |
2010.05.18 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.;HUANG MING-CHIEH;PU CHIANG;CHERN CHAN-HONG;LIN CHIH-CHANG;SWEI YUWEN |
发明人 |
HUANG MING-CHIEH;PU CHIANG;CHERN CHAN-HONG;LIN CHIH-CHANG;SWEI YUWEN |
| 分类号 |
H03B5/30;G01C19/00 |
主分类号 |
H03B5/30 |
| 代理机构 |
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