发明名称 DOOR FOR DIFFUSION FURNACE HAVING HEAT SINK PLATE
摘要 <p>PURPOSE: A door for a diffusion furnace is provided to easily remove impurities by using a heat sink plate for preserving the heat of the diffusion furnace. CONSTITUTION: A diffusion furnace for manufacturing a solar cell includes a diffusion furnace and a door. A heat sink plate(190) is formed in the door connected to the diffusion furnace. The heat sink plate includes a supporting shaft and a heat dissipating plate(195). The supporting shaft(193) is perpendicular to the inner side of the door. The heat dissipating plate is formed on the supporting shaft in a transverse direction.</p>
申请公布号 KR20130016924(A) 申请公布日期 2013.02.19
申请号 KR20110079133 申请日期 2011.08.09
申请人 HYUNDAI HEAVY INDUSTRIES CO., LTD. 发明人 SEO, JUN MO
分类号 H01L21/223;H01L31/18 主分类号 H01L21/223
代理机构 代理人
主权项
地址