| 摘要 |
<p>PURPOSE: An exposure apparatus in a photo lithography system or a lamp in an LCD hardening system is provided to reduce maintenance costs by not using a filter. CONSTITUTION: The surface of a lamp(100) is coated to form a coating film(200). The coating film is used as an exposure filter. The coating film includes a dielectric thin film. A metal thin film is deposited on the electrode part(130) of the lamp.</p> |
