| 发明名称 |
MODULE AND METHOD FOR TREATING SUBSTRATE |
| 摘要 |
<p>PURPOSE: A module and a method for treating a substrate are provided to accurately measure the temperature of a susceptor by shielding light emitting from a heating unit. CONSTITUTION: A susceptor is transferred into a substrate processing apparatus(110a, 110b). A substrate is loaded on the susceptor. The substrate processing apparatus performs substrate processing. The susceptor is transferred to a substrate transferring part(180). A cassette having the substrate is stacked on the substrate transferring part.</p> |
| 申请公布号 |
KR20130016436(A) |
申请公布日期 |
2013.02.15 |
| 申请号 |
KR20100108242 |
申请日期 |
2010.11.02 |
| 申请人 |
YEST CO., LTD. |
发明人 |
SI, SUNG SU;KIM, SANG DOO |
| 分类号 |
H01L21/677;B65G49/07;H01L21/68 |
主分类号 |
H01L21/677 |
| 代理机构 |
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