发明名称 REGION TEMPERATURE-CONTROLLED STRUCTURE
摘要 An area temperature control structure having two or more areas controlled to have different temperatures can maintain a temperature difference between the two or more areas by suppressing thermal conduction in an arrangement direction of the two or more areas while preventing a hot spot from being formed by allowing heat introduced from a direction intersecting with the arrangement direction of the two or more areas to be uniformly transferred. The area temperature control structure includes the two or more areas of which the surface temperatures are controlled to have different temperatures; and an anisotropic thermal conductive layer provided between the two or more areas. A thermal conductivity of the anisotropic thermal conductive layer in the arrangement direction of the two or more areas is smaller than a thermal conductivity thereof in the direction intersecting with the arrangement direction of the two or more areas.
申请公布号 KR20130016313(A) 申请公布日期 2013.02.14
申请号 KR20127027654 申请日期 2011.03.24
申请人 TOKYO ELECTRON LIMITED 发明人 SASAKI YASUHARU
分类号 H01L21/3065;H05B3/10;H05B3/20 主分类号 H01L21/3065
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