摘要 |
An area temperature control structure having two or more areas controlled to have different temperatures can maintain a temperature difference between the two or more areas by suppressing thermal conduction in an arrangement direction of the two or more areas while preventing a hot spot from being formed by allowing heat introduced from a direction intersecting with the arrangement direction of the two or more areas to be uniformly transferred. The area temperature control structure includes the two or more areas of which the surface temperatures are controlled to have different temperatures; and an anisotropic thermal conductive layer provided between the two or more areas. A thermal conductivity of the anisotropic thermal conductive layer in the arrangement direction of the two or more areas is smaller than a thermal conductivity thereof in the direction intersecting with the arrangement direction of the two or more areas. |