发明名称 |
PIEZOELECTRIC SENSORS AND SENSOR ARRAYS FOR THE MEASUREMENT OF WAVE PARAMETERS IN A FLUID, AND METHOD OF MANUFACTURING THEREFOR |
摘要 |
<p>The present disclosure relates to piezoelectric sensors and piezoelectric sensor arrays, to methods of manufacturing therefor, and to a method of measuring characteristics of a mechanical wave using a piezoelectric sensor array. A piezoelectric sensor is formed of a silicon substrate on which an electrical barrier is added. A patterned bottom electrode layer is added on top of the electrical barrier. A patterned bottom electrode layer is added on top of the electrical barrier. A piezoelectric layer and then a patterned top electrode layer are added on top of the electrical barrier.</p> |
申请公布号 |
CA2842778(A1) |
申请公布日期 |
2013.02.14 |
申请号 |
CA20122842778 |
申请日期 |
2012.08.06 |
申请人 |
SOCPRA SCIENCES ET GENIE S.E.C. |
发明人 |
BROUILLETTE, MARTIN;MIRSHEKARI, GHOLAMREZA |
分类号 |
G01H11/08;G01L9/08;G01L19/08 |
主分类号 |
G01H11/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|