USER INTERFACE FOR ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide an easy-to-use user interface for operation of a scanning electron microscope device.

SOLUTION: Provided is a user interface for operation of a scanning electron microscope device that combines low magnification reference images and high magnification images on the same screen to enable a user who is not used to the high magnification images of electron microscopes to readily determine where on a sample an image is being obtained and to understand a relationship between that image and the rest of the sample. The user can change fields of view of an electron image to obtain a different image of the sample by inputting instructions through a touch screen.

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