| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cutting method capable of efficiently removing air bubbles between a dicing tape and a substrate by forming a relatively small number of holes, and further to provide a manufacturing method of an electro-optical device and a dicing tape. <P>SOLUTION: By moving a roller 51 while pressing a dicing tape 60 against the roller 51, a large panel 300 and the dicing tape 60 are bonded to each other. Here, a plurality of holes 65 is radially disposed on the dicing tape 60. More specifically, on the dicing tape 60, the holes 65 is arranged on each of a plurality of virtual radial lines r. Consequently, air bubbles that enter between the dicing tape 60 and the large panel 300 are removed through the holes 65 of the dicing tape 60. <P>COPYRIGHT: (C)2013,JPO&INPIT |
