发明名称 ADHESIVE COMPOSITION FOR TEMPORARY FIXING
摘要 <p>The purpose of the present invention is to provide an acrylic adhesive composition for temporary fixing, which is suitable for suppressing chipping of a silicon wafer when the silicon wafer is processed from a silicon block. This adhesive composition for temporary fixing contains (1) a monomer that has a (meth)acryloyl group, (2) a polymerization initiator, (3) a ß-diketone chelate and/or a ß-ketoester, and (4) an inorganic filler.</p>
申请公布号 WO2013021945(A1) 申请公布日期 2013.02.14
申请号 WO2012JP69851 申请日期 2012.08.03
申请人 DENKI KAGAKU KOGYO KABUSHIKI KAISHA;NAKAJIMA, GOSUKE;KANAI, TOMOYUKI;YODA, KIMIHIKO;OSHIMA, KAZUHIRO 发明人 NAKAJIMA, GOSUKE;KANAI, TOMOYUKI;YODA, KIMIHIKO;OSHIMA, KAZUHIRO
分类号 C09J4/02;B28D5/04;B28D7/04;C09J11/04;C09J11/06;H01L21/304 主分类号 C09J4/02
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