| 摘要 |
<P>PROBLEM TO BE SOLVED: To extend the life of a lamp for heating a substrate. <P>SOLUTION: A substrate processing apparatus comprises: a light receiving chamber where a substrate is processed; a substrate support part provided in the light receiving chamber and supporting the substrate; a lamp which has lamp electric wiring and a sealing part that encloses the lamp electric wiring and hermetically sealing a gas in the lamp, and radiates light to the substrate supported by the substrate support part, a lamp housing part which is provided at the exterior of the light receiving chamber and has the lamp, a lamp connection member connecting with the lamp and supplying a current to the lamp electric wiring; a heat absorbing member formed by a material having heat conductivity higher than that of the sealing part, covering the periphery of the sealing part, and contacting with the sealing part, and a foundation member for contacting with and fixing the heat absorbing member; and an external electrical wiring connecting with the lamp connection member and supplying the current to the lamp connection member. <P>COPYRIGHT: (C)2013,JPO&INPIT |
