,申请号JP20080000680-传众专利搜索

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发明名称
摘要
申请公布号	JP5145052(B2)	申请公布日期	2013.02.13
申请号	JP20080000680	申请日期	2008.01.07
申请人		发明人
分类号	C23C16/448;C23C16/16;H01L21/28;H01L21/285	主分类号	C23C16/448
代理机构		代理人
主权项
地址

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