| 摘要 |
PURPOSE: An optical encoder is provided to have a small quality variation and to measure a position more accurately by manufacturing a whole scanning head at once and not require a separate aligning process. CONSTITUTION: An optical encoder comprises a substrate(360), a light receiving unit(350), a first grating(340), a transparent layer(380), and a second grating(330). The light receiving unit is formed on the substrate. The first grating is formed on the light receiving unit. The transparent layer is formed on the first grating. The second grating is formed on the transparent layer.
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