| 摘要 |
An evaporating apparatus includes a first processing chamber and a second processing chamber, and a blowing device accommodated in the first processing chamber and a vapor deposition source accommodated in the second processing chamber are connected with each other via a connection pipe. An exhaust mechanism for evacuating the inside of the first processing chamber to a preset vacuum level is connected with the first processing chamber. Organic molecules vaporized from the vapor deposition source are blown out from the blowing device via the connection pipe and is adhered on a substrate, whereby a thin film is formed on the substrate. By installing the first processing chamber and the second processing chamber separately, the first processing chamber is not opened to the atmosphere when a film forming material is replenished, so that exhaust efficiency can be improved. |
